Pirogovsky, Peter Y.: search on Z-Library

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1

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XI - Yokohama, Japan (Wednesday 14 April 2004)] Photomask and Next-Generation Lithography Mask Technology XI - DUV ALTA system aerial image enhancement for improved pattern fidelity: phase II

Ungureit, Michael E., Tanabe, Hiroyoshi, Howells, Samuel C., Chabreck, T., Hubbard, J., Klatchko, Asher, Pirogovsky, Peter Y., Teitzel, Robin L., Berwick, Andrew, Skyborg, B., Allen, Paul C., Morgante

Year:

2004

Language:

english

File:

PDF, 617 KB

english, 2004

2

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 8 September 2003)] 23rd Annual BACUS Symposium on Photomask Technology - DUV ALTA system aerial image enhancement for improved pattern fidelity

Allen, Paul C., Buxbaum, Alex H., Howells, Samuel C., Kenan, Boaz, Klatchko, Asher, Pirogovsky, Peter Y., Teitzel, Robin, White, Michael, Kimmel, Kurt R., Staud, Wolfgang

Year:

2003

Language:

english

File:

PDF, 892 KB

english, 2003

3

SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 19 January 2008)] Solid State Lasers XVII: Technology and Devices - Picosecond laser micromachining of advanced semiconductor logic devices

Albelo, Jeffrey A., Clarkson, W. Andrew, Hodgson, Norman, Pirogovsky, Peter Y., O'Brien, James N., Shori, Ramesh K., Baird, Brian W.

Year:

2008

Language:

english

File:

PDF, 530 KB

english, 2008

4

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Wednesday 13 September 2000)] 20th Annual BACUS Symposium on Photomask Technology - Process development for 257-nm photomask fabrication using environmentally stable chemically amplified photoresists

Albelo, Jeff A., Rathsack, Benjamen M., Pirogovsky, Peter Y., Grenon, Brian J., Dao, Giang T.

Year:

2001

Language:

english

File:

PDF, 405 KB

english, 2001

5

Retroperitoneal Sarcoma Mimicking Obstructed Kidney on Tc-99 DTPA Scintigraphy

Tiktinsky, Ekaterina, Horne, Tifha, Pirogovsky, Peter, Domchic, Sergey, Agranovich, Svetlana, Lantsberg, Sophie

Journal:

Clinical Nuclear Medicine

Year:

2009

Language:

english

File:

PDF, 724 KB

english, 2009

6

SPIE Proceedings [SPIE Dresden, Germany - Dresden (Tuesday 5 January 2027)] 21st European Mask and Lithography Conference - ALTA 4700 system mask patterning performance improvements for X-architecture and wafer electrical performance interchangeability with 50kV E-beam

Allen, Paul C., Bohan, Mike, Christenson, Eric R., Dai, H., Duane, M., Hamaker, H. C., Howells, Sam C., Kenan, Boaz, Pirogovsky, Peter, Sadiq, Malik K., Teitzel, Robin, White, Michael, Behringer, Uwe

Year:

2005

Language:

english

File:

PDF, 558 KB

english, 2005

7

Describing thin-film imaging with a Gaussian beam as potential flow

Klatchko, Asher, Pirogovsky, Peter

Journal:

Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 941 KB

english, 2005

8

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 13 September 2004)] 24th Annual BACUS Symposium on Photomask Technology - Next-generation DUV ALTA mask patterning capabilities

Allen, Paul C., Bohan, Michael J., Christenson, Eric R., Hamaker, H. Christopher, Howells, Sam C., Kenan, Boaz, Pirogovsky, Peter, Sadiq, Malik K., Teitzel, Robin L., White, Michael C., Ungureit, Mich

Year:

2004

Language:

english

File:

PDF, 1.04 MB

english, 2004

9

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 13 September 2004)] 24th Annual BACUS Symposium on Photomask Technology - Conformal mapping in microlithography

Klatchko, Asher, Staud, Wolfgang, Weed, J. Tracy, Pirogovsky, Peter

Year:

2004

Language:

english

File:

PDF, 1.02 MB

english, 2004

10

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Advances in Resist Technology and Processing XVIII - Rational design of bleachable nonchemically amplified DUV photoactive compounds

Rathsack, Benjamen M., Houlihan, Francis M., Tattersall, Peter I., Tabery, Cyrus E., Lou, Kathleen, Stachowiak, Timothy B., Medeiros, David R., Albelo, Jeff A., Pirogovsky, Peter Y., McKean, Dennis R.

Year:

2001

Language:

english

File:

PDF, 1.35 MB

english, 2001

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